Tribology In Chemical-Mechanical Planarization / Najlacnejšie knihy
Tribology In Chemical-Mechanical Planarization

Code: 06730525

Tribology In Chemical-Mechanical Planarization

by Hong Liang

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribologic ... more

312.87 €


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Book synopsis

The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.

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Book category Books in English Technology, engineering, agriculture Technology: general issues

312.87 €

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