Code: 11556797
SIMOX
by Maria ANC
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The content includes a ... more
- Language:
English - Binding: Hardback
- Number of pages: 159
Publisher: INSTITUTION OF ENGINEERING & T, 2004
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151.05 €
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Book synopsis
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The content includes a
Book details
Book category Books in English Technology, engineering, agriculture Electronics & communications engineering
151.05 €
- Full title: SIMOX
- Author: Maria ANC
- Language: English
- Binding: Hardback
- Number of pages: 159
- EAN: 9780863413346
- ISBN: 086341334X
- ID: 11556797
- Publisher: INSTITUTION OF ENGINEERING & T
- Weight: 472 g
- Dimensions: 194 × 253 × 13 mm
- Date of publishing: 15. March 2004
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