You might also like

More about Rapid Thermal Processing

• Book details
• Synopsis
• Trending among others

You get 225 loyalty points

Book synopsis

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Book details

Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Full title: Rapid Thermal Processing
• Subtitle: Science and Technology
• Author: Richard B. Fair
• Language: English
• Binding: Hardback
• Number of pages: 430
• EAN: 9780122476907
• ISBN: 0122476905
• ID: 04493400
• Publisher: Academic Press
• Weight: 770 g
• Dimensions: 229 × 152 × 25 mm
• Date of publishing: 07. June 1993

Trending among others

---

---

---