Code: 04493400
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book c ... more
You get 225 loyalty points
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science
89.69 €
Collection points Bratislava a 2642 dalších
Copyright ©2008-24 najlacnejsie-knihy.sk All rights reservedPrivacyCookies
Shopping cart ( Empty )