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Book synopsis

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.

Book details

Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Full title: Metal Impurities in Silicon-Device Fabrication
• Author: Klaus Graff
• Language: English
• Binding: Paperback
• Number of pages: 270
• EAN: 9783642629655
• ISBN: 3642629652
• ID: 02117363
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 450 g
• Dimensions: 235 × 155 × 16 mm
• Date of publishing: 21. October 2012

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