Code: 02060444

Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics: Volume 990

Name: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics: Volume 990
Brand: Materials Research Society
SKU: 02060444
Price: 38.07 EUR
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by Qinghuang LinE. Todd RyanWen-li WuDo Yeung Yoon

Language: English
Binding: Hardback
Number of pages: 360
Publisher: Materials Research Society, 2007
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More about Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics: Volume 990

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In 2004, the microelectronics industry quietly ushered in the Nanoelectronics Era with the mass production of sub-100nm node devices. The current leading-edge semiconductor chips in mass production - the so-called 90nm node devices - have a transistor gate length of less than 50nm. This rapid technological advancement in the semiconductor industry has been made possible by innovations in materials employed in both transistor fabrication (front-end-of-the-line, FEOL) and interconnect fabrication (back-end-of-the-line, BEOL). The 90nm node BEOL features copper (Cu) interconnects and dielectric materials with a low-dielectric constant (k) of about 3.0. However, for the next generations of 65nm node and beyond, evolutionary and revolutionary innovations in BEOL materials and processes are needed to fuel the continued, healthy growth of the semiconductor. This book provides a forum to exchange the latest advances in materials, processes, integration, and reliability in advanced interconnects and packaging. The book also addressed interconnects for emerging technologies, including 3D chip stacking and optical interconnects, as well as interconnects for optoelectronics, plastic electronics and molecular electronics.

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Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

38.07 €

Full title: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics: Volume 990
Subtitle: Symposium Held April 10-12, 2007, San Francisco, California, U.S.A.
Author: Qinghuang LinE. Todd RyanWen-li WuDo Yeung Yoon
Language: English
Binding: Hardback
Number of pages: 360
EAN: 9781558999503
ISBN: 1558999507
ID: 02060444
Publisher: Materials Research Society
Weight: 65 g
Dimensions: 229 × 152 × 21 mm
Date of publishing: 12. September 2007