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More about Ion-Solid Interactions for Materials Modification and Processing: Volume 396

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Book synopsis

Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.

Book details

Book category Books in English Technology, engineering, agriculture Technology: general issues Nanotechnology

• Full title: Ion-Solid Interactions for Materials Modification and Processing: Volume 396
• Author: Yang-Tse ChengLloyd R. HarriottDaryush IlaDavid B. Poker
• Language: English
• Binding: Hardback
• Number of pages: 897
• EAN: 9781558992993
• ISBN: 1558992995
• ID: 02060057
• Publisher: Materials Research Society
• Weight: 1432 g
• Dimensions: 234 × 163 × 53 mm
• Date of publishing: 23. May 1996

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