Code: 20934534
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
by MAR PAMPILL N ARCE
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
- Language:
English - Binding: Paperback
- Number of pages: 164
Publisher: Springer International Publishing AG, 2018
- More about this
121.31 €
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Book synopsis
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
Book details
121.31 €
- Full title: Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
- Author: MAR PAMPILL N ARCE
- Language: English
- Binding: Paperback
- Number of pages: 164
- EAN: 9783319882840
- ISBN: 3319882848
- ID: 20934534
- Publisher: Springer International Publishing AG
- Weight: 2934 g
- Dimensions: 235 × 155 × 11 mm
- Date of publishing: 18. May 2018
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