Code: 04949772
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review t ... more
You get 577 loyalty points
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Book category Books in English Technology, engineering, agriculture Electronics & communications engineering Electronics engineering
230.04 €
Collection points Bratislava a 2642 dalších
Copyright ©2008-24 najlacnejsie-knihy.sk All rights reservedPrivacyCookies
Shopping cart ( Empty )