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Book synopsis

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Book details

Book category Książki po angielsku Technology, engineering, agriculture Industrial chemistry & manufacturing technologies Other manufacturing technologies

• Full title: Micro and Nano Fabrication
• Subtitle: Tools and Processes
• Author: Hans H. Gatzen, Volker Saile
• Language: English
• Binding: Paperback
• Number of pages: 519
• EAN: 9783662508268
• ISBN: 3662508265
• ID: 15201792
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 1115 g
• Dimensions: 235 × 155 × 30 mm
• Date of publishing: 06. October 2016

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