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Więcej informacji o CCD Image Sensors in Deep-Ultraviolet

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Opis

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Szczegóły książki

Kategoria Books in English Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Pełny tytuł: CCD Image Sensors in Deep-Ultraviolet
• Podtytuł: Degradation Behaviour and Damage Mechanisms
• Autor: F. L. A. Nathon
• Język: Angielski
• Oprawa: Twarda
• Liczba stron: 232
• EAN: 9783540226802
• ISBN: 354022680X
• ID: 01559670
• Wydawca: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Waga: 508 g
• Wymiary: 240 × 164 × 20 mm
• Data wydania: 01. March 2005

Ulubione w innej kategorii

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